2014 2(15)

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Glukhov A.V.1, Dragunov V.P.2, Knyazev I.V.1, Dorzhiev V.Yu.2

1Novosibirsk Plant of Semiconductor Devices, Novosibirsk, Russia
2 Novosibirsk State Technical University, Novosibirsk, Russia


Glukhov, A.V., Dragunov, V.P., Knyazev, I.V. and Dorzhiev, V.Yu., (2014) Features of PULL-IN effect in one-capasitor MEMS, Modern Science: Researches, Ideas, Results, Technologies, Iss. #2(15), PP. 62 - 67.


micromechanical system; electromechanical interaction; initial conditions; pull-in-effect; phase portrait; phase trajectories; critical values; electrostatic forces


The analysis of the functioning of one-capacitor microelectromechanical systems (MEMS) with a plane-parallel and interdigitated electrode structure based on electromechanical interactions is conducted. The influence of the initial conditions is considered. The analysis was conducted by examining the phase trajectories. It is shown that the allowable values of power supply voltage, where the pull-in-effect has not manifested for two-electrode MEMS plane-parallel electrodes design, higher than the corresponding values for the design of MEMS comb electrodes. Found that at the initial stage of work the pull-in-effect in the MEMS data can be observed in the power supply voltage, significantly lower values of V0,cr, which are determined only by the conditions of static equilibrium. The obtained analytical expressions allow to define the field of initial conditions (displacement and velocity), where the effects of the collapse of the electrodes does not occur. It is shown that the weight of the movable electrode can significantly influence the manifestation and the lack of the pull-in-effect.


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