2013 1(12)

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Pages:

396 - 402

Language:

RU

Ref.:

8


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2013_1(12)_70.pdf

 

 

THERMOPHYSICAL PROBLEMS OF THE CONTROLLED DECOMPOSITION OF METASTABLE FLUIDS AND ITS APPLICATION FOR THE DESIGN OF MEMS-ACTUATORS

Kuznetsov V.V.1,2

1 Institute of Thermophysics SB RAS, Novosibirsk, Russia
2 Novosibirsk State University, Novosibirsk, Russia


Citation:

Kuznetsov V.V. Thermophysical problems of the controlled decomposition of metastable fluids and its application for the design of MEMS-actuators / V.V. Kuznetsov // Modern Science: Researches, Ideas, Results, Technologies. - Dnepropetrovsk: SPIC "Triacon". - 2013. - Iss. #1(12). - PP. 396 - 402


Keywords:

metastable liquid; pulse heating; phase explosion; explosive boiling; microheater; MEMS-actuator


Abstracts:

Regularities of the formation and decay of metastable states during liquid pulsed heating and their application for improvement of the efficiency of microsystem devices, including MEMS-actuators based on controlled decay of the metastable liquid, were discussed. At high energy flux density the liquid-vapor phase transition occurs at a high intensity of heat and mass fluxes leading to spontaneous generation of a new phase as the phase explosion or explosive boiling. Regularities of the development of phase explosion and explosive boiling for water and alcohols on microheaters were determined theoretically and experimentally, it allows propose the methods for management of the metastable liquid decay. Thermophysical problems of the application of controlled metastable liquid decay in MEMS-actuators were discussed also.


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